equipment and spare parts

  • SST 421-280
    Spray Solvent Tool
    Wafer Size: 200mm
    Number of Tanks: 4
    Number of heated Tanks: 2
    Class 1
    Touch Screen Monitor
    Pneumatic Pumps Trebor 610
  • For further Details:
    Download PDF-Document
request SST 421-280 information


  • SRD and SST 
    Stainless Steel Rotos 
    all Sizes New & Repair
    Made to Customer Specification


request Rotor information
  • Flow-Meter 
    Turbine Flowmeter installed in Semitool SST available new and repair Original Semitool Part Number


 Flow-Meter information

  • Bowls for Spin Rinse Dryer -SRD- and Spray Solvent Tools -SST-
    New available & Repair capability


request Bowl information
  • Assorted Spare Parts

request Parts information

see actuators

see Trebor pumps  

  • A variety of spare parts for Semitool Equipment is available

request Parts information

various spare parts

  • Refurbished Spin Rinse Dryer
see refurbishment pages
please click

SRD 260 S

SRD 270 S

SRD 870 S

SRD 880S

SRD 2300S

SRD 4300S

SRD 8300S


  • Services
please see next page for
 service details


service details

  • Used SRD & SST Rotors
A182-50MB (Balance 0...25)

see Rotor details